Role of nanoparticles generation in the formation of femtosecond laser-induced periodic surface structures on silicon

被引：14

作者：

Xue, Hongyan ^{[1
]}

Deng, Guoliang ^{[1
]}

Feng, Guoying ^{[1
]}

Chen, Lin ^{[1
]}

Li, Jiaqi ^{[1
]}

Yang, Chao ^{[1
]}

Zhou, Shouhuan ^{[1
,2
]}

机构：

[1] Sichuan Univ, Coll Elect & Informat Engn, Inst Laser & Micro Nano Engn, Chengdu 610064, Sichuan, Peoples R China

[2] North China Res Inst Electroopt, Beijing 100015, Peoples R China

来源：

OPTICS LETTERS | 2017年 / 42卷 / 17期

基金：

中国国家自然科学基金;

关键词：

TEMPERATURE; IRRADIATION; PULSE;

D O I：

10.1364/OL.42.003315

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An initial roughness is assumed in the most accepted Sipe-Drude model to analyze laser-induced periodic surface structures (LIPSS). However, the direct experimental observation for the crucial parameters is still lacking. The generation of nanoparticles and low-spatial frequency LIPSS (LSFL) (LIPSS with a periodicity close to laser wavelength) on a silicon surface upon a single pulse and subsequent pulses irradiation, respectively, is observed experimentally. Finite-difference time-domain (FDTD) simulation indicates that the nanoparticles generated with the first pulse enhance the local electric field greatly. Based on the experimental extrapolated parameters, FDTD-eta maps have been calculated. The results show that the inhomogeneous energy deposition, which leads to the formation of LSFL, is mainly from the modulation of the nanoparticles with a radius of around 100 nm. (C) 2017 Optical Society of America

引用

页码：3315 / 3318

页数：4

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