On the formation of regular sub-wavelength ripples by femtosecond laser pulses on silicon

被引：6
|
作者：
Qi, Litao [1 ]
Li, Fangzhou [1 ]
Lin, Haipeng [1 ]
Hu, Jinping [1 ]
机构：
[1] Heilongjiang Univ Sci & Technol, Sch Mech Engn, 2468 Puyuan St, Harbin 150022, Peoples R China
来源：
OPTIK | 2015年 / 126卷 / 24期
基金：
美国国家科学基金会;
关键词：
Femtosecond laser pulses; Silicon; Ripples; Phase explosion; SURFACE-STRUCTURES; COULOMB EXPLOSION; PHASE EXPLOSION; ABLATION; PICOSECOND; SI;
D O I：
10.1016/j.ijleo.2015.09.138
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An experimental investigation on regular sub-wavelength laser induced periodic surface structures (LIPSS) by femtosecond laser pulses on silicon was carried out. In particular, the study reported in this paper indicates that the application of a 780-nm-wavelength femtosecond laser through a 0.2 mm pinhole aperture can produce LIPPS with spatial period of 710 nm. The use of AFM (atomic force microscopy) and of SEM (scanning electron microscope) provided the ability to study the mechanism for LIPPS formation. The study indicates that phase explosion plays an important role in mass removal during LIPPS formation. (C) 2015 Elsevier GmbH. All rights reserved.
引用
收藏
页码：4905 / 4909
页数：5
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