Influence of Thermal Treatment of a Calcium Cobalt Oxide Thin Film by Rapid Thermal Annealing

被引：0
|
作者：
Yu-Jung Cha
In Yeol Hong
Tae Kyoung Kim
Jae Min Lee
Joon Seop Kwak
机构：
[1] Sunchon National University,Department of Printed Electronics Engineering
来源：
Journal of the Korean Physical Society | 2018年 / 72卷
关键词：
Sol-gel processes; Sintering; RTA; Thermoelectric materials; Ca; Co; O;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Ca3Co4O9 thin films were deposited by using a sol-gel method. The films were treated by rapid thermal annealing, which is a fast and simple process. We measured and analyzed the electrical, structural, and optical properties. The Ca3Co4O9 structure changed at temperature above 750 °C, which changed the electrical and the thermal properties. In addition, the thin films similar electrical and structural results when treated in a furnace at 850 °C, which results were confirmed by Xray diffraction, Raman spectroscopy, and a Hall measurement system. Therefore, rapid thermal annealing can produce Ca3Co4O9 thin films for thermoelectric materials.
引用
收藏
页码：390 / 393
页数：3
相关论文
共 50 条
  • [41] Quantum states in fabricating poly-Si thin film by rapid thermal annealing
    Jin, Rui-Min
    Luo, Peng-Hui
    Chen, Lan-Li
    Guo, Xin-Feng
    Lu, Jing-Xiao
    Rengong Jingti Xuebao/Journal of Synthetic Crystals, 2008, 37 (05): : 1195 - 1198
  • [42] Employment of rapid thermal annealing for solution-processed InGaZnO thin film transistors
    Hyena Kwak
    Jaehyun Yang
    Jun-gu Kang
    Tae-Yil Eom
    Hyoungsub Kim
    Hoo-Jeong Lee
    Chiwon Kang
    Journal of Materials Science: Materials in Electronics, 2018, 29 : 8660 - 8665
  • [43] Employment of rapid thermal annealing for solution-processed InGaZnO thin film transistors
    Kwak, Hyena
    Yang, Jaehyun
    Kang, Jun-gu
    Eom, Tae-Yil
    Kim, Hyoungsub
    Lee, Hoo-Jeong
    Kang, Chiwon
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2018, 29 (10) : 8660 - 8665
  • [44] Analysis of Thermal Treatment Influence on Graphene Oxide Thin Film Deposited by Modified Coating Process
    Kang, Xiaoxu
    Kang, Xiaozhi
    Shen, Ruoxi
    Zhong, Xiaolan
    Li, Ming
    Chen, Shoumian
    Zhao, Yuhang
    Liu, Shanshan
    Zhu, Limin
    Lu, Hanwei
    Zhang, Bo
    2019 IEEE 19TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO 2019), 2019, : 364 - 367
  • [45] Enhanced infrared transmission of GZO film by rapid thermal annealing for Si thin film solar cells
    Jia, Haijun
    Matsui, Takuya
    Kondo, Michio
    PROGRESS IN PHOTOVOLTAICS, 2012, 20 (01): : 111 - 116
  • [46] The influence of pulse thermal treatment on thin film properties of anode and thermal zirconium oxides
    Lynkov, LM
    Petrov, NP
    DOKLADY AKADEMII NAUK BELARUSI, 1997, 41 (04): : 117 - 121
  • [47] INFLUENCE OF THERMAL ANNEALING ON STRUCTURAL AND ELECTRICAL PROPERTIES OF NICKEL OXIDE THIN FILMS
    Reddy, A. Mallikarjuna
    Reddy, Ch. Seshendra
    Reddy, A. Sivasankar
    Reddy, P. Sreedhara
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2011, 3 (01) : 225 - 231
  • [48] Influence of rapid thermal annealing temperature on structure and electrical properties of high permittivity HfTiO thin film used in MOSFET
    Ye, Cong
    Zhan, Chao
    Zhang, Jieqiong
    Wang, Hao
    Deng, Tengfei
    Tang, Shiruo
    MICROELECTRONICS RELIABILITY, 2014, 54 (02) : 388 - 392
  • [49] Thin dysprosium oxide films formed by rapid thermal annealing on porous SiC substrates
    Bacherikov, Yu Yu
    Konakova, R., V
    Okhrimenko, O. B.
    Berezovska, N., I
    Lytvyn, O. S.
    Kapitanchuk, L. M.
    Svetlichnyi, A. M.
    SEMICONDUCTOR PHYSICS QUANTUM ELECTRONICS & OPTOELECTRONICS, 2018, 21 (04) : 360 - 364
  • [50] Effects of rapid thermal annealing on humidity sensor based on graphene oxide thin films
    Duy-Thach Phan
    Chung, Gwiy-Sang
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 220 : 1050 - 1055
12345