Influence of Thermal Treatment of a Calcium Cobalt Oxide Thin Film by Rapid Thermal Annealing

被引：0
|
作者：
Yu-Jung Cha
In Yeol Hong
Tae Kyoung Kim
Jae Min Lee
Joon Seop Kwak
机构：
[1] Sunchon National University,Department of Printed Electronics Engineering
来源：
Journal of the Korean Physical Society | 2018年 / 72卷
关键词：
Sol-gel processes; Sintering; RTA; Thermoelectric materials; Ca; Co; O;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Ca3Co4O9 thin films were deposited by using a sol-gel method. The films were treated by rapid thermal annealing, which is a fast and simple process. We measured and analyzed the electrical, structural, and optical properties. The Ca3Co4O9 structure changed at temperature above 750 °C, which changed the electrical and the thermal properties. In addition, the thin films similar electrical and structural results when treated in a furnace at 850 °C, which results were confirmed by Xray diffraction, Raman spectroscopy, and a Hall measurement system. Therefore, rapid thermal annealing can produce Ca3Co4O9 thin films for thermoelectric materials.
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页码：390 / 393
页数：3
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