Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

被引：1

作者：

Men'shakov, A., I ^{[1
,2
]}

Emlin, D. R. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Electrophys, Ural Branch, Ekaterinburg 620016, Russia

[2] Ural Fed Univ, Ekaterinburg 620075, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2021年 / 47卷 / 07期

基金：

俄罗斯科学基金会;

关键词：

titanium nitride; anodic evaporation; self-heated hollow cathode; PVD; PLASMA; DEPOSITION;

D O I：

10.1134/S1063785021050254

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N-2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-mu m thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm(3)/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to similar to 4 mu m/h.

引用

下载

页码：511 / 514

页数：4

共 43 条

[21] DEEP REACTIVE ION ETCHING TECHNIQUE INVOLVING USE OF 3D SELF-HEATED CATHODE
Han, Gang
Murata, Yuki
Ohkawa, Daiki
Sohgawa, Masayuki
Abe, Takashi
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 1281 - 1284
[22] Influence of the self-heated cathode geometry on the parameters of a low-pressure discharge in crossed E×H fields
Zyul'kova L.A.
Kozyrev A.V.
Kagadei V.A.
Proskurovskii D.I.
Russian Physics Journal, 2005, 48 (1) : 84 - 92
[23] FORMATION OF THICK TITANIUM CARBIDE FILMS BY HOLLOW-CATHODE DISCHARGE REACTIVE DEPOSITION PROCESS
KOMIYA, S
UMEZU, N
NARUSAWA, T
THIN SOLID FILMS, 1978, 54 (01) : 51 - 60
[24] Self-pulsing operating mode of hollow cathode discharge in noble gas
He, Shoujie
Ouyang, Jiting
He, Feng
Jia, Hui
PHYSICS OF PLASMAS, 2012, 19 (02)
[25] CHARACTERISTICS OF HOLLOW-CATHODE DISCHARGE PLASMA AND ITS APPLICATION FOR THE REACTIVE ION PLATING OF TIN AND TIC
WHANG, KW
SEO, YW
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1496 - 1500
[26] Impurity composition of atomic hydrogen beam formed by a low-pressure arc-discharge source with self-heated cathode
Kagadei, V. A.
Proskurovski, D. I.
Romanenko, S. V.
HIGH TEMPERATURE MATERIAL PROCESSES, 2007, 11 (04): : 565 - 573
[27] Gas-discharge starting of hollow cathode operation in self-heating mode
Emlin, D. R.
Gavrilov, N. V.
6TH INTERNATIONAL CONGRESS ENERGY FLUXES AND RADIATION EFFECTS, 2018, 1115
[28] High Rate Deposition of Nanofunctionalized Transparent Coatings on Metal and Glass Substrates by Hollow Cathode Arc Activated Reactive Evaporation
Morgner, Henry
Metzner, Christoph
Zywitzki, Olaf
PLASMA PROCESSES AND POLYMERS, 2007, 4 : S551 - S556
[29] Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode
A. S. Grenadyorov
K. V. Oskomov
A. A. Solov’ev
S. V. Rabotkin
Technical Physics, 2016, 61 : 690 - 695
[30] Nanocrystalline α-Al2O3 Coatings Obtained by Reactive Thermal Anodic Evaporation in Arc Discharge at Low Temperature
Gavrilov, N. V.
Kamenetskikh, A. S.
Tretnikov, P. V.
Chukin, A. V.
TECHNICAL PHYSICS LETTERS, 2017, 43 (10) : 951 - 954

← 1 2 3 4 5 →