Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

被引：1

作者：

Men'shakov, A., I ^{[1
,2
]}

Emlin, D. R. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Electrophys, Ural Branch, Ekaterinburg 620016, Russia

[2] Ural Fed Univ, Ekaterinburg 620075, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2021年 / 47卷 / 07期

基金：

俄罗斯科学基金会;

关键词：

titanium nitride; anodic evaporation; self-heated hollow cathode; PVD; PLASMA; DEPOSITION;

D O I：

10.1134/S1063785021050254

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N-2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-mu m thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm(3)/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to similar to 4 mu m/h.

引用

下载

页码：511 / 514

页数：4

共 43 条

[31] Nanocrystalline α-Al2O3 coatings obtained by reactive thermal anodic evaporation in arc discharge at low temperature
N. V. Gavrilov
A. S. Kamenetskikh
P. V. Tretnikov
A. V. Chukin
Technical Physics Letters, 2017, 43 : 951 - 954
[32] Deposition of silicon-carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode
Grenadyorov, A. S.
Oskomov, K. V.
Solov'ev, A. A.
Rabotkin, S. V.
TECHNICAL PHYSICS, 2016, 61 (05) : 690 - 695
[33] Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode
A. S. Kamenetskikh
N. V. Gavrilov
Yu. S. Surkov
P. V. Tretnikov
A. V. Chukin
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2020, 14 : 85 - 91
[34] Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode
Kamenetskikh, A. S.
Gavrilov, N. V.
Surkov, Yu. S.
Tretnikov, P. V.
Chukin, A. V.
JOURNAL OF SURFACE INVESTIGATION, 2020, 14 (01): : 85 - 91
[35] Comparison of structure and properties of SiOx coatings deposited by reactive pulsed magnetron sputtering (PMS) and by hollow cathode activated EB evaporation (HAD)
Zywitzki, O
Sahm, H
Krug, M
Morgner, H
Neumann, M
SURFACE & COATINGS TECHNOLOGY, 2000, 133 : 555 - 560
[36] Effect of Ion Flow Parameters on the Structure and Properties of Aluminum α-Oxide Coatings Obtained in an Arc Discharge via Ion-Assisted Reactive Anodic Evaporation
Gavrilov N.V.
Kamenetskikh A.S.
Tretnikov P.V.
Chukin A.V.
Bulletin of the Russian Academy of Sciences: Physics, 2019, 83 (11) : 1419 - 1423
[37] Sheath and electron density dynamics in the normal and self-pulsing regime of a micro hollow cathode discharge in argon gas
C. Lazzaroni
P. Chabert
A. Rousseau
N. Sadeghi
The European Physical Journal D, 2010, 60 : 555 - 563
[38] Sheath and electron density dynamics in the normal and self-pulsing regime of a micro hollow cathode discharge in argon gas
Lazzaroni, C.
Chabert, P.
Rousseau, A.
Sadeghi, N.
EUROPEAN PHYSICAL JOURNAL D, 2010, 60 (03): : 555 - 563
[39] Influence of the composition of a plasma-forming gas on nitriding in a non-self-maintained glow discharge with a large hollow cathode
Koval, N. N.
Schanin, P. M.
Akhmadeev, Yu. Kh.
Lopatin, I. V.
Kolobov, Yu. R.
Vershinin, D. S.
Smolyakova, M. Yu.
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2012, 6 (01) : 154 - 158
[40] Influence of the composition of a plasma-forming gas on nitriding in a non-self-maintained glow discharge with a large hollow cathode
N. N. Koval
P. M. Schanin
Yu. Kh. Akhmadeev
I. V. Lopatin
Yu. R. Kolobov
D. S. Vershinin
M. Yu. Smolyakova
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2012, 6 : 154 - 158

← 1 2 3 4 5 →