Automatic measurement of electron-beam diameter and astigmatism: BEAMETR

被引：6

作者：

Babin, S. ^{[1
]}

Gaevski, M. ^{[2
]}

Joy, D. ^{[3
,4
]}

Machin, M. ^{[1
]}

Martynov, A. ^{[1
]}

机构：

[1] Abeam Technol, 5286 Dunnigan Ct, Castro Valley, CA 94546 USA

[2] Univ South Carolina, Columbia, SC 29208 USA

[3] Oak Ridge Natl Lab, Oak Ridge, TN 37381 USA

[4] Univ Tennessee, EM Facil, Knoxville, TN 37996 USA

来源：

PROCEEDINGS OF THE SEVENTH INTERNATIONAL CONFERENCE ON CHARGED PARTICLE OPTICS (CPO-7) | 2008年 / 1卷 / 01期

关键词：

Electron probe diameter; Software; SEM resolution;

D O I：

10.1016/j.phpro.2008.07.085

中图分类号：

O412 [相对论、场论]; O572.2 [粒子物理学];

学科分类号：

摘要：

Beam size is one of the major characteristics of any electron beam system. Accuracy and resolution of SEM and an EBL system directly depend on beam diameter; it should be monitored and tuned frequently. Currently used methods are not accurate and are operator dependent. A technique is described to determine beam size using an automatic procedure. In the developed method, a specially designed and fabricated test pattern is scanned using an e-beam. A spectra of the signal is analyzed; beam diameter is automatically determined using a software program. Results of design, fabrication, and analysis of the beam calibration test pattern are presented. (C) 2008 Elsevier B. V. All rights reserved.

引用

页码：113 / 118

页数：6

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