High current gain stability of carbon-doped p-GaAs in InGaP/GaAs heterojunction bipolar transistors

被引:5
|
作者
Yamada, Hisashi [1 ]
Fukuhara, Noboru [1 ]
Hata, Masahiko [1 ]
机构
[1] Sumitomo Chem Co Ltd, Tsukuba Res Lab, Tsukuba, Ibaraki 3003294, Japan
关键词
defects; doping; metal organic chemical vapor deposition;
D O I
10.1016/j.jcrysgro.2006.10.114
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The thermal annealing effect on InGaP/GaAs heterojunction bipolar transistor (HBT) grown at V/III ratios of 0.7 and 25 in the base layer was investigated. Hydrogen concentration for the V/III ratio of 0.7 showed about two times-higher than that for the V/III ratio of 25. Current gain for the V/III ratio of 0.7 decreased with hydrogen concentration reduced. However, current gain for the V/III ratio of 25 did not change even though hydrogen concentration reduced at 7 x 10(17)cm(-3). Infrared absorption (IR) measurement revealed that the V/III ratio of 0.7 contained C-H and C-2-H complex, while the V/III ratio of 25 only contained C-H complex. The C-H complex intensity was decreased when annealed at 600 degrees C for 5 min. However, the C-2-H complex intensity still remained. From gain drift dependence on hydrogen concentration, it was found that the C-2-H complex did not contribute to gain drift. We suggest that decomposition of the C-2-H complex causes defect centers, which leads to current gain degradation. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:857 / 860
页数:4
相关论文
共 50 条
  • [1] Influence of V/III ratio of carbon-doped p-GaAs on current gain and its thermal stability in InGaP/GaAs heterojunction bipolar transistors
    Yamada, H
    Fukuhara, N
    Hata, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5A): : 3909 - 3912
  • [2] InGaP/GaAs carbon-doped heterostructures for heterojunction bipolar transistors
    Hartmann, QJ
    Ahmari, DA
    Yang, Q
    Curtis, AP
    Stillman, GE
    [J]. HETEROSTRUCTURE EPITAXY AND DEVICES: HEAD '97, 1998, 48 : 155 - 160
  • [3] CARBON-DOPED INGAP/GAAS/INGAP DOUBLE HETEROJUNCTION BIPOLAR-TRANSISTORS
    CHEN, YK
    KAPRE, R
    TSANG, WT
    WU, MC
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (11) : 2657 - 2657
  • [4] Annealing study of InGaP/GaAs heterojunction bipolar transistor and carbon-doped p+GaAs base layers
    Moriarty, GR
    Murtagh, M
    Cherkaoui, K
    Gouez, G
    Kelly, PV
    Crean, GM
    Bland, SW
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 80 (1-3): : 284 - 288
  • [5] Thermal stability of current gain in InGaP/GaAsSb/GaAs double-heterojunction bipolar transistors
    Yan, BP
    Hsu, CC
    Wang, XQ
    Yang, ES
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (19) : 4505 - 4507
  • [6] IMPROVED PERFORMANCE OF CARBON-DOPED GAAS BASE HETEROJUNCTION BIPOLAR-TRANSISTORS THROUGH THE USE OF INGAP
    ABERNATHY, CR
    REN, F
    WISK, PW
    PEARTON, SJ
    ESAGUI, R
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (09) : 1092 - 1094
  • [7] Temperature dependence of current gain of InGaP/InGaAsN/GaAs heterojunction bipolar transistors
    Tang, WB
    Hsu, HT
    Fan, CC
    Wang, CH
    Li, NY
    Hsin, YM
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2004, 201 (09): : 2190 - 2193
  • [8] Hydrogen in carbon-doped GaAs base layer of GaInP/GaAs heterojunction bipolar transistors
    Richter, E
    Kurpas, P
    Sato, M
    Trapp, M
    Zeimer, U
    Hahle, S
    Weyers, M
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 44 (1-3): : 337 - 340
  • [9] The effect of n-GaAs carrier concentration on current gain in InGaP/GaAs heterojunction bipolar transistors
    Yamada, Hisashi
    Fukuhara, Noboru
    Hata, Masahiko
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (8A): : 5122 - 5124
  • [10] Degradation of AlGaAs/GaAs and InGaP/GaAs heterojunction bipolar transistors under high current stress
    Masum, J
    Hall, TJ
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1997, 12 (10) : 1202 - 1209