High current gain stability of carbon-doped p-GaAs in InGaP/GaAs heterojunction bipolar transistors

被引:5
|
作者
Yamada, Hisashi [1 ]
Fukuhara, Noboru [1 ]
Hata, Masahiko [1 ]
机构
[1] Sumitomo Chem Co Ltd, Tsukuba Res Lab, Tsukuba, Ibaraki 3003294, Japan
关键词
defects; doping; metal organic chemical vapor deposition;
D O I
10.1016/j.jcrysgro.2006.10.114
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The thermal annealing effect on InGaP/GaAs heterojunction bipolar transistor (HBT) grown at V/III ratios of 0.7 and 25 in the base layer was investigated. Hydrogen concentration for the V/III ratio of 0.7 showed about two times-higher than that for the V/III ratio of 25. Current gain for the V/III ratio of 0.7 decreased with hydrogen concentration reduced. However, current gain for the V/III ratio of 25 did not change even though hydrogen concentration reduced at 7 x 10(17)cm(-3). Infrared absorption (IR) measurement revealed that the V/III ratio of 0.7 contained C-H and C-2-H complex, while the V/III ratio of 25 only contained C-H complex. The C-H complex intensity was decreased when annealed at 600 degrees C for 5 min. However, the C-2-H complex intensity still remained. From gain drift dependence on hydrogen concentration, it was found that the C-2-H complex did not contribute to gain drift. We suggest that decomposition of the C-2-H complex causes defect centers, which leads to current gain degradation. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:857 / 860
页数:4
相关论文
共 50 条
  • [21] Characterization of InGaP/GaAs heterojunction bipolar transistors with a heavily doped base
    [J]. Oka, T, 1600, Japan Society of Applied Physics (40):
  • [22] Characterization of InGaP/GaAs heterojunction bipolar transistors with a heavily doped base
    Oka, T
    Ouchi, K
    Mochizuki, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (9A): : 5221 - 5226
  • [23] An X-band carbon-doped InGaP/GaAs heterojunction bipolar transistor MMIC oscillator
    Kim, YG
    Kim, CW
    Kim, SI
    Min, BG
    Lee, JM
    Lee, KH
    [J]. ETRI JOURNAL, 2005, 27 (01) : 75 - 80
  • [24] INGAP/GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS WITH AN ULTRA-HIGH CARBON-DOPED BASE (P=1.5X10(21) CM(-3))
    SHIRAKASHI, J
    AZUMA, T
    FUKUCHI, F
    KONAGAI, M
    TAKAHASHI, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (2B): : 1204 - 1207
  • [25] CARBON-DOPED GAINP/GAAS DOUBLE HETEROSTRUCTURE-EMITTER BIPOLAR-TRANSISTORS WITH HIGH-CURRENT GAIN
    YANG, YF
    HSU, CC
    YANG, ES
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1995, 42 (07) : 1383 - 1386
  • [26] THE ROLE OF HYDROGEN IN CURRENT-INDUCED DEGRADATION OF CARBON-DOPED GAAS/ALGAAS HETEROJUNCTION BIPOLAR-TRANSISTORS
    REN, F
    ABERNATHY, CR
    CHU, SNG
    LOTHIAN, JR
    PEARTON, SJ
    [J]. SOLID-STATE ELECTRONICS, 1995, 38 (06) : 1137 - 1141
  • [27] Reliability investigation of InGaP/GaAs heterojunction bipolar transistors
    Bahl, SR
    Camnitz, LH
    Houng, D
    Mierzwinski, M
    [J]. IEEE ELECTRON DEVICE LETTERS, 1996, 17 (09) : 446 - 448
  • [28] Effects of passivation-layer thickness and current gain enhancement of InGaP/GaAs δ-doped single heterojunction bipolar transistors using an InGaP passivation layer
    Lour, WS
    Hsieh, JL
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1998, 13 (08) : 847 - 851
  • [29] Carbon-doped GaIn/GaAs heterojunction bipolar transistors grown by metalorganic chemical vapor deposition using nitrogen as the carrier gas
    Hsu, CC
    Yang, YF
    Ou, HJ
    Yang, ES
    Lo, HB
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (22) : 3248 - 3250
  • [30] Small InGaP/GaAs heterojunction bipolar transistors with high-speed operation
    Oka, T
    Ouchi, K
    Nakamura, T
    [J]. ELECTRONICS LETTERS, 1997, 33 (04) : 339 - 340