Nanopillar Fabrication with Focused Ion Beam Cutting

被引：12
|
作者：
Kuzmin, Oleksii V. [1 ]
Pei, Yutao T. [1 ]
De Hosson, Jeff T. M. [1 ]
机构：
[1] Univ Groningen, Mat Innovat Inst M2i, Dept Appl Phys, Zernike Inst Adv Mat, NL-9747 AG Groningen, Netherlands
来源：
MICROSCOPY AND MICROANALYSIS | 2014年 / 20卷 / 05期
关键词：
nanopillars; focused ion beam; metallic glass; TEM; METALLIC-GLASS; SIZE; MICROSCOPY;
D O I：
10.1017/S1431927614001032
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A versatile method to fabricate taper-free micro-/nanopillars of large aspect ratio was developed with focused ion beam (FIB) cutting. The key features of the fabrication are a FIB with an incident angle of 90 degrees to the long axis of the pillar that enables milling of the pillar sideways avoiding tapering and the FIB current can be reduced step by step so as to reduce possible radiation damage of the milled surface by Ga ions. A procedure to accurately determine the cross-section of each pillar was developed.
引用
收藏
页码：1581 / 1584
页数：4
相关论文
共 50 条
  • [41] Deterministic fabrication of nanostructures for plasmonic lens by focused ion beam
    Luo, Xichun
    Sun, Jining
    Ritchie, James M.
    Chang, Wenlong
    Wang, Wei
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2011, 57 (9-12): : 1003 - 1009
  • [42] Fabrication of nanopore array electrodes by focused ion beam milling
    Lanyon, Yvonne H.
    De Marzi, Gianluca
    Watson, Yvonne E.
    Quinn, Aidan J.
    Gleeson, James P.
    Redmond, Gareth
    Arrigan, Damien W. M.
    ANALYTICAL CHEMISTRY, 2007, 79 (08) : 3048 - 3055
  • [43] Focused ion beam-induced fabrication of tungsten structures
    Ishida, M
    Fujita, J
    Ichihashi, T
    Ochiai, Y
    Kaito, T
    Matsui, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2728 - 2731
  • [44] Focused ion beam fabrication of thermally actuated bimorph cantilevers
    Teng, J
    Prewett, PD
    SENSORS AND ACTUATORS A-PHYSICAL, 2005, 123-24 : 608 - 613
  • [45] Fabrication of Nanoarms and Nanotips via Focused Ion Beam Milling
    Jiang, Xiaoxiao
    Gu, Qiongchan
    Lv, Jiangtao
    Liu, Yanjun
    Si, Guangyuan
    Duan, Hongjun
    Ma, Zhenhe
    Wang, Fengwen
    Teng, Jinghua
    2012 PHOTONICS GLOBAL CONFERENCE (PGC), 2012,
  • [46] Design and fabrication of nano-scale single crystal diamond cutting tool by focused ion beam (FIB) milling
    Baek, Seung-Yub
    INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2015), 2015, 9524
  • [47] Deep reactive ion etching and focused ion beam combination for nanotip fabrication
    Villanueva, G
    Plaza, JA
    Sánchez-Amores, A
    Bausells, J
    Martínez, E
    Samitier, J
    Errachid, A
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2006, 26 (2-3): : 164 - 168
  • [48] Microstructural evolution of a focused ion beam fabricated Mg nanopillar at high temperatures: Defect annihilation and sublimation
    Jeong, Jiwon
    Lee, Subin
    Kim, Youbin
    Han, Seung Min
    Kiener, Daniel
    Kang, Youn-Bae
    Oh, Sang Ho
    SCRIPTA MATERIALIA, 2014, 86 : 44 - 47
  • [49] Fine patterning and fabrication of diamond chips with electron beam and focused-ion beam
    Taniguchi, J
    Miyamoto, I
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2000, 10 (02): : 79 - 95
  • [50] Fine Patterning and Fabrication of Diamond Chips with Electron Beam and Focused-Ion Beam
    2000, M Y U Scientific Publishing Division (10):
12345