Test and Analysis of SAW High Temperature Strain Sensor Based on Langasite

被引:5
|
作者
Yan, Xiawen [1 ]
Tan, Qiulin [1 ]
Li, Xiangrong [1 ]
Xue, Tao [1 ]
Li, Meipu [1 ]
机构
[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
基金
中国国家自然科学基金;
关键词
High-temperature environment; Langasite; strain sensor; surface acoustic wave; temperature-strain decoupling method; CALIBRATION; PRESSURE;
D O I
10.1109/JSEN.2022.3176689
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, we fabricate a surface acoustic wave strain sensor based on langasite. By constructing a temperature-strain composite testing platform, we examine this sensor for the strains of 0 to 500 mu epsilon at temperatures ranging from 18 to 700 degrees C. The value obtained from the tests for the strain sensitivity of the sensor is 20.09 Hz/mu epsilon at 700 degrees C, and the maximum relative error and hysteresis error are 3.35% and 6.98%, respectively. Moreover, the sensor exhibits a stable response at high temperatures. Considering the sensitivity of the temperature and strain of the sensor at high temperatures, a temperature - strain decoupling method is proposed. The strain values obtained after the calculation agreed well with the reference strain values, and the maximum error was between -4.2% and 5.425%. Therefore, the proposed temperature - strain decoupling method could help eliminate the influence of temperature on the strain measurements of this sensor.
引用
收藏
页码:12622 / 12628
页数:7
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