Langasite-based SAW high-temperature vibration sensor with temperature decoupling

Monitoring high-temperature vibrations is critical in aerospace engineering, industrial manufacturing, and energy production, where harsh conditions necessitate robust vibration sensors for detecting anomalous signals. However, the accuracy of such sensors is often compromised by crosstalk between temperature and vibration signals. This study introduces a high-temperature vibration sensor based on langasite (LGS) surface acoustic wave (SAW) technology, designed to withstand temperatures up to 500 degrees C. The sensor demonstrates high sensitivity, ranging from 12.54 kHz/g at 25 degrees C to 15.63 kHz/g at 500 degrees C. A comprehensive mechanical and electrical coupling model for the SAW vibration sensor was developed by integrating theoretical equations with numerical simulations to optimize the sensor's performance. Additionally, a novel decoupling algorithm for temperature and vibration was established, achieving thermomechanical decoupling with precise vibration parameters. Experimental results indicated a maximum relative deviation of 4.67% for the algorithm. In conclusion, the proposed LGS SAW vibration sensor emerges as a promising solution for the accurate detection of multiple parameters in high-temperature vibration monitoring.