High temperature SAW gas sensor on langasite

被引：14
|
作者：
Thiele, JA [1 ]
da Cunha, MP [1 ]
机构：
[1] Univ Maine, Dept Elect & Comp Engn, Orono, ME 04473 USA
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
D O I：
10.1109/ICSENS.2003.1279045
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750degreesC) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sensors have been exposed to temperatures from 250degreesC to 750degreesC and cycled more than ten times in that temperature range over periods from two to six weeks. Gas sensing of C2H4 in N-2 and H-2 in N-2 with baselines of O-2 and N-2 on the LGS SAW devices has been performed from 250degreesC to 550degreesC and is reported for the first time in this paper.
引用
收藏
页码：769 / 772
页数：4
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