Development of a High Resolution Interferometric System for Testing the Optical Elements in ELI

被引：0
|
作者：
Czitrovszky, Aladar [1 ]
Kiss, Arpad [1 ]
Nagy, Attila [1 ]
Kerekes, Attila [1 ]
Oszetzky, Daniel [1 ]
机构：
[1] Res Inst Solid State Phys & Opt, H-1525 Budapest, Hungary
来源：
LIGHT AT EXTREME INTENSITIES: OPPORTUNITIES AND TECHNOLOGICAL ISSUES OF THE EXTREME LIGHT INFRASTRUCTURE | 2010年 / 1228卷
关键词：
3D imaging; interference; image acquisition; data processing; surface topography; wave front reconstruction; phase retrieval; coherence; Michelson Interferometer;
D O I：
10.1063/1.3426045
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The development and application of a phase shifting interferometric system for testing optical surfaces is described. Several application examples of this instrument for 3D surface topography diagnostics are presented. After certain expedient reconstruction the system can be used for testing the optical elements and different coatings in ELI (Extreme Light Infrastructure).
引用
收藏
页码：144 / 149
页数：6
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