Modelling, design and fabrication of a novel reconfigurable ultra-wide-band impedance matching based on RF MEMS technology

This study proposes an adaptive impedance-matching network with tremendously reduced dimensions and presents its fabrication process. The proposed radio-frequency micro-electromechanical system (RF MEMS) device is based on a coplanar waveguide design and relies on suspended bridges for impedance tuning. The tuning is controlled by a variable applied DC voltage to the bridges. Preliminary tests validate the device's operation mechanism, and simulations were performed on both the mechanical aspects of the device (bridge gap manipulation) and tuning capabilities. This device presents the possibility of operating in a wide band of frequencies, namely [1-6] GHz, and for load impedances in the interval of [30-90] omega for the real part and [-10-30] for the imaginary part. The device's resonant frequency and its bandwidth can be modified easily by changing the bridge gap in the RF MEMS.