Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

被引：3
|
作者：
Kortshagen, U [1 ]
Heil, B [1 ]
机构：
[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA
来源：
APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 09期
关键词：
D O I：
10.1063/1.1289905
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons. (C) 2000 American Institute of Physics. [S0003-6951(00)00435-6].
引用
收藏
页码：1265 / 1267
页数：3
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