Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

被引：3

作者：

Kortshagen, U ^{[1
]}

Heil, B ^{[1
]}

机构：

[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 09期

关键词：

D O I：

10.1063/1.1289905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons. (C) 2000 American Institute of Physics. [S0003-6951(00)00435-6].

引用

页码：1265 / 1267

页数：3

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