Piezoelectric properties of lead-free CaBi4Ti4O15 thin films

被引：10
|
作者：
Arai, F
Motoo, K
Fukuda, T
Kato, K
机构：
[1] Nagoya Univ, Dept Micronano Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源：
APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 18期
关键词：
D O I：
10.1063/1.1806555
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
CaBi4Ti4O15 (CBTi144) thin films are evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. CBTi144 thin films were prepared on Pt substrates by dip coating a precursor solution of metal alkoxides. We fabricated a piezoelectric bimorph actuator using those films and analyzed the displacement induced by the electric field. Young's modulus was measured by the vibrating-reed technique and the piezoelectric constant d(31) was derived by analysis of bending displacement and measurement of displacement-voltage curve. The measurements revealed that the CBTi144 films had a large piezoelectric constant d(31) of 32 pm/V. (C) 2004 American Institute of Physics.
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收藏
页码：4217 / 4218
页数：2
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