Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

被引：2

作者：

Benoit, Robert R. ^{[1
]}

Barker, N. Scott ^{[2
]}

机构：

[1] US Army Res Lab, Adelphi, MD 20783 USA

[2] Univ Virginia, Dept Elect & Elect Engn, Charlottesville, VA 22904 USA

来源：

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY | 2017年 / 5卷 / 04期

基金：

美国国家科学基金会;

关键词：

RF MEMS; cryogenics; superconducting resonators; tunable circuits; devices; BANDPASS-FILTERS; SWITCHES; CONTACTS;

D O I：

10.1109/JEDS.2017.2706676

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz. Simulations show that the resonator Q is highly sensitive to the contact resistance of the MEMS when the switches are actuated. Measurements confirm that the Q degrades from 200 to 50. RF performance of the resonator is investigated at cryogenic (4 K) temperatures while the Nb is superconducting.

引用

页码：239 / 243

页数：5

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