Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

被引：2
|
作者：
Benoit, Robert R. [1 ]
Barker, N. Scott [2 ]
机构：
[1] US Army Res Lab, Adelphi, MD 20783 USA
[2] Univ Virginia, Dept Elect & Elect Engn, Charlottesville, VA 22904 USA
来源：
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY | 2017年 / 5卷 / 04期
基金：
美国国家科学基金会;
关键词：
RF MEMS; cryogenics; superconducting resonators; tunable circuits; devices; BANDPASS-FILTERS; SWITCHES; CONTACTS;
D O I：
10.1109/JEDS.2017.2706676
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz. Simulations show that the resonator Q is highly sensitive to the contact resistance of the MEMS when the switches are actuated. Measurements confirm that the Q degrades from 200 to 50. RF performance of the resonator is investigated at cryogenic (4 K) temperatures while the Nb is superconducting.
引用
收藏
页码：239 / 243
页数：5
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