X-ray reflection from thin multilayers: symmetric patterns

被引:2
|
作者
Karimov, P
Harada, S
Kawai, J
机构
[1] Kyoto Univ, Dept Mat Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
[2] Russian Acad Sci, Inst Engn Sci, Urals Branch, Ekaterinburg 620219, Russia
关键词
x-ray reflection; travelling waves; symmetric patterns;
D O I
10.1002/sia.1497
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A series of experiments on x-ray reflection from thin multilayers and films on a silicon wafer were carried out. The x-ray source and detector were fixed and the glancing angle was changed by sample stage rotation. The use of a Geiger-Muller counter allowed bizarre symmetric patterns to be obtained in the reflected x-ray intensity. The origin of these patterns is not clear at the present stage of the investigation. To perform a preliminary analysis of the x-ray reflection from multilayers, the Microsoft Access database has been developed. Copyright (C) 2003 John Wiley Sons, Ltd.
引用
收藏
页码:76 / 79
页数:4
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