X-ray reflection from thin multilayers: symmetric patterns

被引:2
|
作者
Karimov, P
Harada, S
Kawai, J
机构
[1] Kyoto Univ, Dept Mat Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
[2] Russian Acad Sci, Inst Engn Sci, Urals Branch, Ekaterinburg 620219, Russia
关键词
x-ray reflection; travelling waves; symmetric patterns;
D O I
10.1002/sia.1497
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A series of experiments on x-ray reflection from thin multilayers and films on a silicon wafer were carried out. The x-ray source and detector were fixed and the glancing angle was changed by sample stage rotation. The use of a Geiger-Muller counter allowed bizarre symmetric patterns to be obtained in the reflected x-ray intensity. The origin of these patterns is not clear at the present stage of the investigation. To perform a preliminary analysis of the x-ray reflection from multilayers, the Microsoft Access database has been developed. Copyright (C) 2003 John Wiley Sons, Ltd.
引用
收藏
页码:76 / 79
页数:4
相关论文
共 50 条
  • [21] Specular and non-specular X-ray reflection from inorganic and organic multilayers
    de Boer, DKG
    Leenaers, AJG
    van der Wielen, MWJ
    Stuart, MAC
    Fleer, GJ
    Nieuwhof, RP
    Marcelis, ATM
    Sudholter, EJR
    PHYSICA B, 1998, 248 : 274 - 279
  • [22] Analysis of applicability of approximate methods in the theory of x-ray reflection from magnetic multilayers
    E. E. Odintsova
    M. A. Andreeva
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2010, 4 : 913 - 922
  • [23] Analysis of applicability of approximate methods in the theory of x-ray reflection from magnetic multilayers
    Odintsova, E. E.
    Andreeva, M. A.
    JOURNAL OF SURFACE INVESTIGATION, 2010, 4 (06): : 913 - 922
  • [24] Structure characterization of metallic multilayers by symmetric and asymmetric X-ray diffraction
    Gladyszewski, G
    Labat, S
    Gergaud, P
    Thomas, O
    THIN SOLID FILMS, 1998, 319 (1-2) : 78 - 80
  • [25] Numerical and experimental study of disordered multilayers for broadband x-ray reflection
    vanLoevezijn, P
    Schlatmann, R
    Verhoeven, J
    vanTiggelen, BA
    Gullikson, EM
    APPLIED OPTICS, 1996, 35 (19): : 3614 - 3619
  • [26] X-ray scattering from metallic multilayers
    Rafaja, D
    EPDIC 7: EUROPEAN POWDER DIFFRACTION, PTS 1 AND 2, 2001, 378-3 : 1 - 10
  • [27] The deposition and characterization of multilayers on thin foil X-ray mirrors for high throughput X-ray telescopes
    Hussain, AM
    Joensen, KD
    Hoghoj, P
    Christensen, FE
    Louis, E
    Voorma, HJ
    Soong, Y
    White, N
    Serlemitsos, PJ
    Anderson, I
    MULTILAYER AND GRAZING INCIDENCE X-RAY/EUV OPTICS III, 1996, 2805 : 336 - 342
  • [28] CHARACTERIZATION OF MULTILAYERS AND THIN FILMS BY HIGH RESOLUTION X-RAY DIFFRACTION AND X-RAY STANDING WAVES
    Kovalchuk, Mikhail
    Zheludeva, Svetlana
    Shubnikov, A. V.
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 1996, 52 : C394 - C394
  • [29] THIN FILM SURFACE STUDIES BY X-RAY REFLECTION
    CROCE, P
    DEVANT, G
    SERE, MG
    VERHAEGHE, MF
    SURFACE SCIENCE, 1970, 22 (01) : 173 - +
  • [30] The genetic algorithm: refinement of X-ray reflectivity data from multilayers and thin films
    Ulyanenkov, A
    Omote, K
    Harada, J
    PHYSICA B-CONDENSED MATTER, 2000, 283 (1-3) : 237 - 241