Numerical methods for the high-frequency analysis of MEMS capacitive switches

被引：0
|
作者：
Vietzorreck, L [1 ]
Coccetti, F [1 ]
Chtchekatourov, V [1 ]
Russer, P [1 ]
机构：
[1] Tech Univ Munich, Inst Hochfrequenztech, D-80333 Munich, Germany
来源：
2000 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS | 2000年
关键词：
D O I：
10.1109/SMIC.2000.844314
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the Transmission Line Matrix method (TLM) and by the Method of Lines (MoL), The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accuracy.
引用
收藏
页码：123 / 124
页数：2
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