Dynamic actuation methods for capacitive MEMS shunt switches

We develop dynamic actuation methods for capacitive MEMS shunt switches. We show that the dynamic actuation voltage is significantly less than the static actuation voltage and demonstrate 60% reduction in the actuation voltage. We also show that this reduction in the actuation voltage depends on the specific dynamic switching technique adopted. For a given operating condition, the minimum realizable switching time is that obtained using static switching. However, we developed a dynamic switching method that yields comparable switching time to that minimum. We also found that squeeze-film damping is the dominant damping mechanism for a shunt switch with a relatively slender bridge (aspect ratio of 11: 1).