Dynamic Pull-in of Shunt Capacitive MEMS Switches

被引：15
|
作者：
Vummidi, Krishna [1 ]
Khater, M. [2 ]
Abdel-Rahman, E. [2 ]
Nayfeh, A. [3 ]
Raman, S. [1 ]
机构：
[1] Virginia Tech, Bradley Dept ECE, Blacksburg, VA 24061 USA
[2] Univ Waterloo, Dept SYDE, Waterloo, ON N2L 3G1, Canada
[3] Virginia Tech, Dept ESM, Blacksburg, VA USA
来源：
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期
关键词：
Shunt switches; Dynamic Actuation; MEMS; Reduced-order models;
D O I：
10.1016/j.proche.2009.07.155
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (V-DP = V-DC + RMS v(ac)) as an actuation method. We show that V-DP is significantly less than the static pull-in voltage (V-SP = V-DC) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.
引用
收藏
页码：622 / +
页数：2
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