On the Impedance of the High-Frequency Capacitive Discharge at Different Excitation Methods

被引：0

作者：

Dvinin, S. A. ^{[1
]}

Sinkevich, O. A. ^{[2
]}

Kodirzoda, Z. A. ^{[3
]}

Solikhov, D. K. ^{[3
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119899, Russia

[2] Natl Res Univ MPEI, Moscow 111250, Russia

[3] Tajik Natl Univ, Fac Phys, Dushanbe 973402, Tajikistan

来源：

PLASMA PHYSICS REPORTS | 2022年 / 48卷 / 01期

关键词：

low-temperature plasma; surface high-frequency electromagnetic waves; plasma impedance; high-frequency discharge; ELECTROMAGNETIC-FIELD EXCITATION; LARGE-AREA; SYMMETRIC DISCHARGE; FEATURES;

D O I：

10.1134/S1063780X22010044

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A low-pressure (nu MUCH LESS-THAN omega) capacitive high-frequency discharge with large-area electrodes when it is excited by an electromagnetic field with a frequency from 13 to 900 MHz is considered. General analytical formulas are obtained for the amplitudes of natural waves and the impedance of the discharge. It is taken into account that the excitation of surface waves and higher nonpropagating modes occurs due to the axial inhomogeneity of the plasma-metal layer structure and due to edge effects at the electrode cut. The higher amplitude of the resonance modes in this case (in comparison with the excitation of the discharge by a TEM wave) leads to a greater irregularity in the dependence of the discharge impedance on the electron density. This conclusion is confirmed by the direct calculation of impedance using the Comsol Multiphysics (R) software.

引用

页码：74 / 77

页数：4

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