Bipolar Resistive Switching Characteristics of Transparent Indium Gallium Zinc Oxide Resistive Random Access Memory

被引:105
|
作者
Chen, Min-Chen [1 ]
Chang, Ting-Chang [1 ,2 ]
Huang, Sheng-Yao [1 ]
Chen, Shih-Ching [1 ]
Hu, Chih-Wei [3 ,4 ]
Tsai, Chih-Tsung [1 ]
Sze, Simon M. [3 ,4 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[2] Natl Sun Yat Sen Univ, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan
[3] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan
[4] Natl Chiao Tung Univ, Inst Elect, Hsinchu 300, Taiwan
关键词
D O I
10.1149/1.3360181
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
This study investigates a sputtered InGaZnO (IGZO) thin film to apply into a resistive random access memory device. After the formation of an indium tin oxide (ITO)/IGZO/ITO structure at room temperature, the device exhibits a repeatable bipolar resistance switching behavior without an electroforming process and an excellent transmittance in the visible region. The conduction mechanisms for low and high resistance states are dominated by Ohm's law and space-charge-limited current behavior, respectively. In retention and endurance tests, a resistance ratio of more than 1 order remains after 10(4) s at 90 degrees C and after 100 dc voltage sweeping cycles. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3360181] All rights reserved.
引用
收藏
页码:II191 / II193
页数:3
相关论文
共 50 条
  • [1] Bipolar resistive switching properties in transparent vanadium oxide resistive random access memory
    Yang, Fann-Wei
    Chen, Kai-Huang
    Cheng, Chien-Min
    Su, Feng-Yi
    [J]. CERAMICS INTERNATIONAL, 2013, 39 : S729 - S732
  • [2] Bipolar resistive switching of chromium oxide for resistive random access memory
    Chen, Shih-Cheng
    Chang, Ting-Chang
    Chen, Shih-Yang
    Chen, Chi-Wen
    Chen, Shih-Ching
    Sze, S. M.
    Tsai, Ming-Jinn
    Kao, Ming-Jer
    Huang, Fon-Shan Yeh
    [J]. SOLID-STATE ELECTRONICS, 2011, 62 (01) : 40 - 43
  • [3] Transparent resistive random access memory and its characteristics for nonvolatile resistive switching
    Seo, Jung Won
    Park, Jae-Woo
    Lim, Keong Su
    Yang, Ji-Hwan
    Kang, Sang Jung
    [J]. APPLIED PHYSICS LETTERS, 2008, 93 (22)
  • [4] An Indium-Free Transparent Resistive Switching Random Access Memory
    Zheng, K.
    Sun, X. W.
    Zhao, J. L.
    Wang, Y.
    Yu, H. Y.
    Demir, H. V.
    Teo, K. L.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2011, 32 (06) : 797 - 799
  • [5] Transparent bipolar resistive switching memory on a flexible substrate with indium-zinc-oxide electrodes
    Yeom, Seung-Won
    Ha, Hyeon Jun
    Park, Junsu
    Shim, Jae Won
    Ju, Byeong-Kwon
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2016, 69 (11) : 1613 - 1618
  • [6] Transparent bipolar resistive switching memory on a flexible substrate with indium-zinc-oxide electrodes
    Seung-Won Yeom
    Hyeon Jun Ha
    Junsu Park
    Jae Won Shim
    Byeong-Kwon Ju
    [J]. Journal of the Korean Physical Society, 2016, 69 : 1613 - 1618
  • [7] Bipolar resistive switching characteristics of tungsten-doped indium-zinc oxide conductive-bridging random access memory
    Gan, Kai-Jhih
    Liu, Po-Tsun
    Lin, Sheng-Jie
    Ruan, Dun-Bao
    Chien, Ta-Chun
    Chiu, Yu-Chuan
    Sze, Simon M.
    [J]. VACUUM, 2019, 166 : 226 - 230
  • [8] Improvement of Resistive Switching Characteristics in Zinc Oxide-Based Resistive Random Access Memory by Ammoniation Annealing
    Wu, Pei-Yu
    Zheng, Hao-Xuan
    Shih, Chih-Cheng
    Chang, Ting-Chang
    Chen, Wei-Jang
    Yang, Chih-Cheng
    Chen, Wen-Chung
    Tai, Mao-Chou
    Tan, Yung-Fang
    Huang, Hui-Chun
    Ma, Xiao-Hua
    Hao, Yue
    Tsai, Tsung-Ming
    Sze, Simon M.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2020, 41 (03) : 357 - 360
  • [9] Resistive Switching of Plasma-Treated Zinc Oxide Nanowires for Resistive Random Access Memory
    Lai, Yunfeng
    Qiu, Wenbiao
    Zeng, Zecun
    Cheng, Shuying
    Yu, Jinling
    Zheng, Qiao
    [J]. NANOMATERIALS, 2016, 6 (01):
  • [10] Bipolar Resistive Switching Characteristics of TiN/HfOx/ITO Devices for Resistive Random Access Memory Applications
    Tan Ting-Ting
    Chen Xi
    Guo Ting-Ting
    Liu Zheng-Tang
    [J]. CHINESE PHYSICS LETTERS, 2013, 30 (10)