Scanning Joule expansion microscopy at nanometer scales

被引：108
|
作者：
Varesi, J
Majumdar, A [1 ]
机构：
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[2] Univ Calif Santa Barbara, Dept Mech Engn, Santa Barbara, CA 93106 USA
来源：
APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 01期
关键词：
D O I：
10.1063/1.120638
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report a new technique called scanning Joule expansion microscopy that can simultaneously image surface topography and material expansion due to Joule heating with vertical resolution in the 1 pm range and lateral resolution similar to that of an atomic force microscope. By coating the sample with a polymer film, we demonstrate that sample temperature distribution can be directly measured without the need of fabricating temperature-sensing scanning probes. (C) 1998 American Institute of Physics.
引用
收藏
页码：37 / 39
页数：3
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