Scanning nonlinear dielectric microscopy with nanometer resolution

被引:0
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作者
Cho, Y [1 ]
Kazuta, S [1 ]
Matsuura, K [1 ]
Odagawa, H [1 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A very high-resolution scanning nonlinear dielectric microscope with nanometer resolution was developed for the observation of ferroelectric polarization. We demonstrate that the resolution of the microscope is of a nanometer order by measurement of the c - c domain wall of a BaTiO3 single crystal and of the domains in PZT and SBT thin films. Especially in a film measurement, the resolution was sub-nanometer order. Next, we also demonstrate that the resolution of SNDM is higher than that of a conventional piezo-response imaging. Finally, to check the performance of the SNDM system as a ferroelectric recording system, we conducted a fundamental study on the writing of domain inversion dot in PZT thin film and succeeded to have a very small domain dots with the size of 25nm.
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页码:279 / 282
页数:4
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