FEM modeling of AlN/diamond surface acoustic waves device

被引：13
|
作者：
Le Brizoual, L. [1 ]
Elmazria, O. [1 ]
机构：
[1] Nancy Univ, CNRS, UMR 7040, Lab Phys Mil Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France
来源：
DIAMOND AND RELATED MATERIALS | 2007年 / 16卷 / 4-7期
关键词：
FEM; SAW; AlN; diamond;
D O I：
10.1016/j.diamond.2007.01.002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper describes a general finite element method (FEM) for the AC steady state analysis of two-dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to a AlN layer of 5.2 mu m thick and a spatial periodicity of 12 mu m. The structure admittance response shows peaks corresponding to the modes 0, 1, 2 and 3. The penetration depth in diamond is around 24 mu m. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：987 / 990
页数：4
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