Dispersion of surface acoustic waves in polycrystalline diamond plates

被引:29
|
作者
Lehmann, G
Schreck, M
Hou, L
Lambers, J
Hess, P [1 ]
机构
[1] Heidelberg Univ, Inst Phys Chem, D-69120 Heidelberg, Germany
[2] Univ Augsburg, Inst Phys, D-86135 Augsburg, Germany
[3] Inst Artificial Crystals, Beijing, Peoples R China
关键词
diamond properties and applications; surface acoustic waves; elastic properties; ultrasonics;
D O I
10.1016/S0925-9635(00)00410-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Five free-standing polycrystalline diamond plates were grown by electron-assisted hot filament CVD on molybdenum using different deposition parameters. The homogeneity of the elastic properties was studied for each side of the samples by surface acoustic waves (SAWs) using pulsed laser excitation and piezoelectric detection. From the velocities of the longitudinal acoustic bulk waves (LABWs) and SAWs, values of the Poisson ratio of approximately v = 0.14 +/- 0.06 were obtained. The Young's modulus varied between E = 928 +/- 40 GPa and E = 1098 +/- 43 GPa. Anomalous dispersion of the SAWs on the nucleation side was observed in some samples. In addition the mean velocity of the SAWs was generally higher on the nucleation side than on the growth side. This indicates that the elastic properties changed considerably during the growth process. Measurements of the grain size by scanning electron microscopy (SEM), of the phase purity by Raman spectroscopy, and the texture by X-ray diffraction (XRD) were performed in order to estimate the contribution of different effects to the dispersion and the side dependence of the SAW velocities. In addition Fourier transform infrared (FTIR) spectroscopy was applied to study the influence of the hydrogen content. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:686 / 692
页数:7
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