FEM modeling of AlN/diamond surface acoustic waves device

被引：13

作者：

Le Brizoual, L. ^{[1
]}

Elmazria, O. ^{[1
]}

机构：

[1] Nancy Univ, CNRS, UMR 7040, Lab Phys Mil Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France

来源：

关键词：

FEM; SAW; AlN; diamond;

D O I：

10.1016/j.diamond.2007.01.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes a general finite element method (FEM) for the AC steady state analysis of two-dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to a AlN layer of 5.2 mu m thick and a spatial periodicity of 12 mu m. The structure admittance response shows peaks corresponding to the modes 0, 1, 2 and 3. The penetration depth in diamond is around 24 mu m. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：987 / 990

页数：4

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