Towards sub-100-nm X-ray microscopy for tomographic applications

被引:10
|
作者
Bruyndonckx, P. [1 ]
Sasov, A. [1 ]
Pauwels, B. [1 ]
机构
[1] Skyscan, B-2550 Kontich, Belgium
关键词
nanotomography; nanofocal spot size; X-ray microscopy;
D O I
10.1154/1.3416936
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have demonstrated that structures down to 150 nm can be visualized in X-ray projection images using nanofocus X-ray sources. Due to their unlimited depth of focus, they do not possess a limit on the specimen size. This is essential for three-dimensional tomographic imaging of samples with a diameter larger than a few microns. Further simulation studies have shown that optimization of the detector response curve and switching from a reflective X-ray target to a transmission target should allow us to reach sub-100-nm resolutions. (C) 2010 International Centre for Diffraction Data. [DOI: 10.1154/1.3416936]
引用
收藏
页码:157 / 160
页数:4
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