Nanostructured Kinoform Optical Elements for High Power Laser Systems

被引：0

作者：

Atuchin, Victor V. ^{[1
]}

Soldatenkov, Ivan S. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Semicond Phys, Lab Opt Mat & Struct, Novosibirsk 630090, Russia

来源：

EDM: 2009 10TH INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES | 2009年

关键词：

Kinoform; fused silica; photolithography; wet etching; WAVE-FRONT DISLOCATIONS; PHASE CORRECTION; VORTEX; GENERATION; SILICA; DAMAGE; BEAMS;

D O I：

10.1109/EDM.2009.5173937

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Different kinoform elements have been fabricated in fused silica by precise chemical etching. Kinoform phase relief have been made with an accuracy of similar to 5 nm. A vortex kinoform mode converter which transforms a zero order Hermite-Gaussian laser mode to first order Laguerre-Gaussian mode with screw phase dislocation has been demonstrated. Conversion efficiency >90% for high power laser beams has been achieved in testing experiments.

引用

页码：89 / 91

页数：3

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