NANOSTRUCTURED COMPOSITE MATERIALS FOR 3D ELEMENTS OF ADVANCED OPTICAL SYSTEMS

被引：0
|
作者：
Timoshkov, Ioury [1 ]
Kurmashev, Victor [2 ]
Sakova, Anastasiya [1 ]
Timoshkov, Vadim [1 ]
机构：
[1] Belarusian State Univ Informat & Radioelect, Minsk, BELARUS
[2] Belarusian State Acad Telecommun, Minsk, BELARUS
来源：
MATERIALS PHYSICS AND MECHANICS | 2019年 / 41卷 / 01期
关键词：
nanocomposite electroplating; nanostructured material; optical system; photoresist;
D O I：
10.18720/MPM.4112019_10
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nanocomposite materials electroplating for nano- and micro-fabrication with Si mold and LIGA-like technological process is proposed. UV lithography based on SU-8 photoresist for ultra-thick 3D structures is described. Two-stage process for high aspect ratio vertical metal structures fabrication is considered. Possible applications of the proposed technological approaches for advanced optical systems are described.
引用
收藏
页码：69 / 73
页数：5
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