Line-edge roughness, part 2

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作者：
Mack, Chris A.
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来源：
MICROLITHOGRAPHY WORLD | 2007年 / 16卷 / 02期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：12 / 14
页数：3
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