On the control of the nematic orientation on the silicon surface processed by a focused gallium ion beam

被引:1
|
作者
Kucheev, S. I. [1 ]
Tuchina, Yu. S. [1 ]
机构
[1] Belgorod State Univ, Belgorod 308015, Russia
关键词
LIQUID-CRYSTALS; ALIGNMENT;
D O I
10.1134/S1063784210060253
中图分类号
O59 [应用物理学];
学科分类号
摘要
Preliminary results of studying the orientation of a 5CB nematic on the single-crystalline silicon surface processed by a 30-keV focused Ga ion beam ar e reported. It is shown that the nematic can be controllably imparted on a homeotropic or inclined orientation depending on the surface irradiation dose. By varying the scanning raster of the ion beam, one can obtain different surface patterns with a micrometer resolution and a desired orientation of the nematic.
引用
收藏
页码:883 / 886
页数:4
相关论文
共 50 条
  • [21] Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method
    Han, Zhongmei
    Vehkamaki, Marko
    Mattinen, Miika
    Salmi, Emma
    Mizohata, Kenichiro
    Leskela, Markku
    Ritala, Mikko
    NANOTECHNOLOGY, 2015, 26 (26)
  • [22] Simulation of Material Sputtering and Gallium Implantation during Focused Ion Beam Irradiation of a Silicon Substrate
    O. V. Podorozhniy
    A. V. Rumyantsev
    R. L. Volkov
    N. I. Borgardt
    Semiconductors, 2023, 57 : 58 - 64
  • [23] Simulation of Material Sputtering and Gallium Implantation during Focused Ion Beam Irradiation of a Silicon Substrate
    Podorozhniy, O. V.
    Rumyantsev, A. V.
    Volkov, R. L.
    Borgardt, N. I.
    SEMICONDUCTORS, 2023, 57 (01) : 58 - 64
  • [24] Fracture strength analysis of single-crystalline silicon cantilevers processed by focused ion beam
    Takahashi, Yoshimasa
    Kondo, Hikaru
    Niimi, Hironobu
    Nokuo, Takeshi
    Suzuki, Toshiaki
    SENSORS AND ACTUATORS A-PHYSICAL, 2014, 206 : 81 - 87
  • [25] Behavior of gallium secondary ion intensity in gallium focused ion beam secondary ion mass spectrometry
    Sakamoto, Tetsuo
    Owari, Masanori
    Nihei, Yoshimasa
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (3 A): : 1287 - 1291
  • [26] Study of the topography of silicon surface evolution under irradiation by a gallium ion beam
    Smirnova, M. A.
    Bachurin, V. I.
    Lebedev, M. E.
    Mazaletsky, L. A.
    Pukhov, D. E.
    Churilov, A. B.
    Rudy, A. S.
    VACUUM, 2022, 203
  • [27] Behavior of gallium secondary ion intensity in gallium focused ion beam secondary ion mass spectrometry
    Sakamoto, T
    Owari, M
    Nihei, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (3A): : 1287 - 1291
  • [28] GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis
    Xia, Deying
    Jiang, Ying-Bing
    Notte, John
    Runt, Doug
    APPLIED SURFACE SCIENCE, 2021, 538
  • [29] Fabrication of discrete gallium nanoislands on the surface of a Si(001) substrate using a focused ion beam
    Wang, Hao
    Gray, Jennifer L.
    NANOTECHNOLOGY, 2011, 22 (42)
  • [30] Participation of focused ion beam implanted gallium ions in metal-assisted chemical etching of silicon
    Hildreth, Owen
    Rykaczewski, Konrad
    Wong, Ching Ping
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (04):