Behavior of gallium secondary ion intensity in gallium focused ion beam secondary ion mass spectrometry

被引：0
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作者：
Sakamoto, Tetsuo [1 ]
Owari, Masanori [1 ]
Nihei, Yoshimasa [1 ]
机构：
[1] Univ of Tokyo, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 3 A期
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页码：1287 / 1291
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