Behavior of gallium secondary ion intensity in gallium focused ion beam secondary ion mass spectrometry

被引：0

作者：

Sakamoto, Tetsuo ^{[1
]}

Owari, Masanori ^{[1
]}

Nihei, Yoshimasa ^{[1
]}

机构：

[1] Univ of Tokyo, Tokyo, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 3 A期

关键词：

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学科分类号：

摘要：

引用

页码：1287 / 1291

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