Operation model for split runcard automation in 300mm environment

被引：0
|
作者：
Liu, ACP [1 ]
Gong, HM [1 ]
Lin, WY [1 ]
Hsu, SHJ [1 ]
机构：
[1] Taiwan Semicond Mfg Co, Hsinchu 30077, Taiwan
来源：
2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP | 2002年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Split RUNCARD operation is positioned to be a manual operation on semiconductor environment for a long time; Not only equipment is in manual mode, further more, it is impossible for FAB users to trace lot related information. "Operation Model for Split RUNCARD Automation" is an operation reference model that describe the principle of how to create an add-on CIM system to enable MES supporting split RUNCARD event, especially for the 300mm equipment's auto mode.
引用
收藏
页码：123 / 125
页数：3
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