300mm full automation integration test methodology and experience

Taiwan Semiconductor Manufacturing Company launched the first 300mm fully automation foundry in 1999. The newly introduced technology will automate the 300mm fab for better manufacturing control and less human labor. Based on accumulated TSMC data from year 1999 to year 2000, the lesson TSMC found to maintain is more difficult than to build up the system. It's really a great challenge to integraie so many hardware and software components closely. In fact, few 300mm foundries are successful from maintenance viewpoint TSMC is still continuing to improve the fab full. automation by strict integration test methodology and refer to daily problem analysis system. TSMC enlarges acceptance test scope covering process equipment, transportation, material control and manufacturing system. In order to make sure the integration is smooth and on the right way, TSMC has developed a methodology to execute hardware and software integration. Here TSMC exposes some critical issues and shares the experience for unmanned factory. TSMC believes these can help 300mm fab to speed up system construction task and find out their own problem by TSMC's methodology and experience.