Barrier layers on aluminium and gold by plasma polymerization

被引：2

作者：

Oehr, C ^{[1
]}

Schindler, B ^{[1
]}

机构：

[1] Fraunhofer Inst Grenzflachen & Bioverfahrenstech, D-70569 Stuttgart, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 1998年 / 98卷 / 1-3期

关键词：

aluminium; barrier layers; gold; plasma polymerization;

D O I：

10.1016/S0257-8972(97)00171-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Plasma procedures were used for the deposition of polymer barrier layers that are highly cross-linked as a consequence of the molecular fragmentation of the feed gases. Plasma polymers from vinyltrimethysilan (VTMS) as feed gas showed good protection against chemical and electrochemical attacks on gold (against 4 M H2SO4). A combination of a plasma-VTMS primer covered by a plasma hydrocarbon layer showed good resistance against alkaline corrosion on aluminium. (C) 1998 Published by Elsevier Science S.A.

引用

页码：848 / 850

页数：3

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