Characterization of argon dielectric barrier discharges applied to ethyl lactate plasma polymerization

被引:10
|
作者
Laurent, Morgane [1 ,2 ,3 ]
Desjardins, Edouard [4 ]
Meichelboeck, Maximilian [1 ,2 ]
Naude, Nicolas [3 ]
Stafford, Luc [4 ]
Gherardi, Nicolas [3 ]
Laroche, Gaetan [1 ,2 ]
机构
[1] Univ Laval, Ctr Rech Mat Avances, Dept Genie Mines Met & Mat, Lab Ingn Surface, 1045 Ave Med, Quebec City, PQ G1V 0A6, Canada
[2] Ctr Rech CHU Quebec, Hop St Francois Assise, 10 Rue LEspinay, Quebec City, PQ G1L 3L5, Canada
[3] Univ Toulouse, UPS, CNRS, LAPLACE,INPT, Toulouse, France
[4] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
dielectric barrier discharge; electron temperature; argon metastable; ethyl lactate; optical emission spectroscopy; current density; COLLISIONAL-RADIATIVE MODEL; ATMOSPHERIC-PRESSURE; ELECTRON-TEMPERATURE; DENSITY; DEPOSITION; GLOW;
D O I
10.1088/1361-6463/aa916d
中图分类号
O59 [应用物理学];
学科分类号
摘要
The influence of the input voltage frequency (35 and 150 kHz), interelectrode gap (1 and 2 mm) and precursor concentration (250, 350, and 450 ppm) on the electron temperature (T-e), number density of metastable Ar atoms (n(Ar-m)), and discharge current density (proportional to the electron density ne) is studied in an argon-ethyl lactate dielectric barrier discharge (DBD). An argon-ammonia Penning mixture is also considered as reference. These results are correlated to the chemistry (XPS, IR) and topography (AFM) of the ethyl-lactate-based plasma polymer coatings. Low T-e values from 0.3 to 0.5 eV were obtained for all discharges. This observation, in addition to resemblances with the Ar-NH3 mixture, suggested that the ionization kinetics of ethyl lactate-based discharges is driven by Penning reactions. Among the investigated parameters, the dissipated power obtained through changes of the excitation frequency had the largest impact on both the coatings properties and the discharge behavior.
引用
收藏
页数:11
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