Barrier layers on aluminium and gold by plasma polymerization

被引：2
|
作者：
Oehr, C [1 ]
Schindler, B [1 ]
机构：
[1] Fraunhofer Inst Grenzflachen & Bioverfahrenstech, D-70569 Stuttgart, Germany
来源：
SURFACE & COATINGS TECHNOLOGY | 1998年 / 98卷 / 1-3期
关键词：
aluminium; barrier layers; gold; plasma polymerization;
D O I：
10.1016/S0257-8972(97)00171-0
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Plasma procedures were used for the deposition of polymer barrier layers that are highly cross-linked as a consequence of the molecular fragmentation of the feed gases. Plasma polymers from vinyltrimethysilan (VTMS) as feed gas showed good protection against chemical and electrochemical attacks on gold (against 4 M H2SO4). A combination of a plasma-VTMS primer covered by a plasma hydrocarbon layer showed good resistance against alkaline corrosion on aluminium. (C) 1998 Published by Elsevier Science S.A.
引用
收藏
页码：848 / 850
页数：3
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