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- [2] Electrochemical study of ultra-thin silicon oxides CLEANING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING VII, PROCEEDINGS, 2002, 2002 (26): : 211 - 217
- [6] Compound states profile and thickness of ultra-thin silicon dioxide film Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research, 2012, 26 (05): : 461 - 466
- [10] ULTRA-THIN STRIP SILICON DETECTORS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1992, 313 (03): : 561 - 562