共 50 条
- [35] Investigations of strength properties of ultra-thin silicon Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005, : 105 - 111
- [36] Fabrication of Ultra-thin Silicon PIN Detector INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2011: SENSOR AND MICROMACHINED OPTICAL DEVICE TECHNOLOGIES, 2011, 8191
- [37] Fabrication of ultra-thin strained silicon on insulator Journal of Electronic Materials, 2003, 32 : 972 - 975
- [38] Ultra-thin film dielectric reliability characterization GATE DIELECTRIC INTEGRITY: MATERIAL, PROCESS, AND TOOL QUALIFICATION, 2000, 1382 : 27 - 40