Texture evolution in stratified Al thin films

The texture evolution of Al thin films stratified by thin Ti and SiO2 interlayers was investigated by cross sectional transmission electron microscopy and x-ray diffractometer measurements. The individual films between the Ti layers grow according to zone II by grain growth, while the structure of the film as a whole is formed by competitive growth. The texture evolution in the Al films stratified by the Ti interlayers is enhanced due to oriented nucleation of Al on the Ti film. In case of stratification by amorphous SiO2 films the texture sharpness corresponds to the texture of the individual Al sublayers. The investigations indicate that stratification can be an appropriate tool for texture control.