Texture in thin films

被引:6
|
作者
Detavernier, C
Lavoie, C
机构
[1] Univ Ghent, Dept Solid State Phys, B-9000 Ghent, Belgium
[2] IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY USA
来源
关键词
texture; thin film; coating; epitaxy; fiber texture;
D O I
10.4028/www.scientific.net/MSF.495-497.1333
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
First, a brief overview is given of different experimental methods that can be used to characterize texture (x-ray diffraction pole figure measurements and electron backscattered diffraction), with an emphasis on the challenges that are presented by the small grain size and limited amount of material present in thin film samples. Second, a classification is presented of the types of texture that have been reported for thin films, and various terminologies are discussed (fiber texture, in-plane texture, biaxial texture, epitaxy, epitaxial alignment and axiotaxy). Finally, several driving forces are described that can cause texture selection and texture evolution in thin films.
引用
收藏
页码:1333 / 1342
页数:10
相关论文
共 50 条
  • [1] TEXTURE OF THIN COBALT FILMS
    HERAS, JM
    DEFRANCESCO, C
    TOSCANO, E
    ACTA CIENTIFICA VENEZOLANA, 1979, 30 (05): : 456 - 461
  • [2] Texture development in thin films
    Lee, DN
    TEXTURES OF MATERIALS, PTS 1 AND 2, 2002, 408-4 : 75 - 94
  • [3] Texture studies on borocarbide thin films
    Rao, KS
    Tamm, R
    Wimbush, SC
    Cao, GH
    Oertel, CG
    Skrotzki, W
    Holzapfel, B
    ICOTOM 14: TEXTURES OF MATERIALS, PTS 1AND 2, 2005, 495-497 : 1425 - 1430
  • [4] Equipment for texture measurement in thin films
    Szpunar, J.A.
    Blandford, P.
    Materials Science Forum, 1994, 157-6 (pt 1) : 207 - 212
  • [5] TEXTURE OF EVAPORATED NIFE THIN FILMS
    VERDERBER, RR
    JOURNAL OF APPLIED PHYSICS, 1959, 30 (09) : 1359 - 1363
  • [6] Growth and texture of polycrystalline thin films
    Smith, RW
    Ying, F
    Srolovitz, DJ
    POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 39 - 44
  • [7] Texture transformations in Ag thin films
    Baker, Shefford P.
    Hoffman, Brandon
    Timian, Lindsay
    Silvemail, Adam
    Ellis, Elizabeth A.
    ACTA MATERIALIA, 2013, 61 (19) : 7121 - 7132
  • [8] APPLICATIONS OF TEXTURE IN THIN-FILMS
    KNORR, DB
    SZPUNAR, JA
    JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 1994, 46 (09): : 42 - 48
  • [9] TEXTURE DEVELOPMENT IN THIN METALLIC-FILMS
    KNORR, DB
    TRACY, DP
    LU, TM
    TEXTURES AND MICROSTRUCTURES, 1991, 14 : 543 - 554
  • [10] Grain growth and texture evolution in thin films
    Massachusetts Inst of Technology, Cambridge, United States
    Mater Sci Forum, pt 1 (83-98):