Texture in thin films

被引:6
|
作者
Detavernier, C
Lavoie, C
机构
[1] Univ Ghent, Dept Solid State Phys, B-9000 Ghent, Belgium
[2] IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY USA
来源
关键词
texture; thin film; coating; epitaxy; fiber texture;
D O I
10.4028/www.scientific.net/MSF.495-497.1333
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
First, a brief overview is given of different experimental methods that can be used to characterize texture (x-ray diffraction pole figure measurements and electron backscattered diffraction), with an emphasis on the challenges that are presented by the small grain size and limited amount of material present in thin film samples. Second, a classification is presented of the types of texture that have been reported for thin films, and various terminologies are discussed (fiber texture, in-plane texture, biaxial texture, epitaxy, epitaxial alignment and axiotaxy). Finally, several driving forces are described that can cause texture selection and texture evolution in thin films.
引用
收藏
页码:1333 / 1342
页数:10
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