Texture and secondary extinction measurements in Al/Ti stratified films by X-ray diffraction

In the present work the effects of secondary extinction has been studied using standard X-ray diffractometer and texture diffractometer techniques. For this purpose the texture of Al/Ti stratified films have been measured and evaluated. It is shown that these films have a very sharp single component texture. Therefore the evaluation and the interpretation of the measurement data is only possible when secondary extinction correction is carried out. The effect of secondary extinction is evaluated on the 111 pole figures of the stratified films with different layer pair numbers. The volume fraction of the main texture component is calculated from pole figures and it is shown that the grains of the films are practically completely oriented with [111] crystallographic direction parallel to the film surface normal. Moreover in the case of pole density measurements the secondary extinction values themselves are simultaneously calculated. (C) 1998 Elsevier Science Ltd. All rights reserved.